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Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures - ScienceDirect
Study of the step coverage and contact resistance by using two-step TiN barrier and evolve simulation
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Step coverage of the fine grain CVD-W films with different deposition... | Download Scientific Diagram
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PDF] On the mechanism of the step coverage of blanket tungsten chemical vapor deposition | Semantic Scholar
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Effect of substrate on the step coverage of plasma-enhanced chemical-vapor deposited tetraethylorthosilicate films
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